JPH0614860Y2 - 帯状極低張力シートの異物除去装置 - Google Patents

帯状極低張力シートの異物除去装置

Info

Publication number
JPH0614860Y2
JPH0614860Y2 JP3684490U JP3684490U JPH0614860Y2 JP H0614860 Y2 JPH0614860 Y2 JP H0614860Y2 JP 3684490 U JP3684490 U JP 3684490U JP 3684490 U JP3684490 U JP 3684490U JP H0614860 Y2 JPH0614860 Y2 JP H0614860Y2
Authority
JP
Japan
Prior art keywords
sheet
belt
foreign matter
roller
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3684490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03128482U (en]
Inventor
國治 首藤
明 堀口
和夫 上野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP3684490U priority Critical patent/JPH0614860Y2/ja
Publication of JPH03128482U publication Critical patent/JPH03128482U/ja
Application granted granted Critical
Publication of JPH0614860Y2 publication Critical patent/JPH0614860Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP3684490U 1990-04-04 1990-04-04 帯状極低張力シートの異物除去装置 Expired - Lifetime JPH0614860Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3684490U JPH0614860Y2 (ja) 1990-04-04 1990-04-04 帯状極低張力シートの異物除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3684490U JPH0614860Y2 (ja) 1990-04-04 1990-04-04 帯状極低張力シートの異物除去装置

Publications (2)

Publication Number Publication Date
JPH03128482U JPH03128482U (en]) 1991-12-25
JPH0614860Y2 true JPH0614860Y2 (ja) 1994-04-20

Family

ID=31543431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3684490U Expired - Lifetime JPH0614860Y2 (ja) 1990-04-04 1990-04-04 帯状極低張力シートの異物除去装置

Country Status (1)

Country Link
JP (1) JPH0614860Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004034757A1 (ja) * 2002-10-11 2004-04-22 Unitech Corporation 基板クリーニング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004034757A1 (ja) * 2002-10-11 2004-04-22 Unitech Corporation 基板クリーニング装置

Also Published As

Publication number Publication date
JPH03128482U (en]) 1991-12-25

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